1. M. Esashi, J. Micromech. Microeng. 18, 7 (2008).
2. Y. Cao, W. Ning, and L. Luo, IEEE Trans. Electron. Packag. Manuf. 32, 3 (2009).
3. Y. Cao and L. Luo, J. Semicond. 30, 8 (2009).
4. C.W. Lin, H.A. Yang, W.C. Wang, and W. Fang, J. Micromech. Microeng. 17, 6 (2007).
5. C. Gillot, J.L. Pornin, A. Arnaud, E. Lagoutte, N. Sillon, and J.C. Souriau, in Proceedings of the IEEE 7th Electronic Packaging Technology Conference (1996), p. 243.