Al-enhanced PECVD SiNx induced hydrogen passivation in string ribbon silicon-Reference-Cited by-同舟云学术

Al-enhanced PECVD SiNx induced hydrogen passivation in string ribbon silicon

Published:2001-05 Issue:5 Volume:30 Page:526-531
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:Journal of Elec Materi

Author:

Yelundur V.,Rohatgi A.,Ebong A.,Gabor A. M.,Hanoka J.,Wallace R. L.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11664-001-0093-0.pdf

Reference25 articles.

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3. K.A. Munzer, K.T. Holdermann, R.E. Schlosser, and S. Sterk, Proc. 2nd WCEPVSEC (Ispra, Italy: EC Joint Research Centre, 1998), p. 1214.

4. R.L. Wallace, J.I. Hanoka, A. Rohatgi, and G. Crotty, Sol. Energy Mater. Sol. Cells 48, 179 (1997).

5. I. Jonak-Auer, R. Meisels, and F. Kuchar, Infrared Phys. Technol. 38, 223 (1997).

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