1. The National Technology Roadmap for Semiconductor, 3rd ed. (Semiconductor Industry Association, San Jose, CA, 1997).
2. K. Eriguchi, Y. Harada, and M. Niwa, IEEE Int. Electron Device Meeting (Piscataway, NJ: IEEE, 1998), pp. 175–178.
3. M. Nagamine, H. Ito, H. Satake, and A. Toriumi, Technical Digest IEDM ’98 (San Francisco, CA: IEDM, 1998), pp. 593–598.
4. T. Ueno, A. Morioka, S. Chikamura, and Y. Iwasaki, Jpn. J. Appl. Phys. 39, L327 (2000).
5. K. Nakamura, A. Kurokawa, and S. Ichimura, J. Vac. Sci. Technol. 15, 2441 (1997).