Radio frequency bias power effects on silicon nitride film deposited in SiH4-NH3 using a plasma-enhanced chemical vapor deposition
Author:
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Metals and Alloys,Mechanics of Materials,Condensed Matter Physics
Link
http://link.springer.com/content/pdf/10.1007/s12540-009-0881-7.pdf
Reference17 articles.
1. S. Bae, D. G. Farber, and S. J. Fonash, Solid-State Electron. 44, 1355 (2000).
2. G. Suchaneck, V. Norkus, and G. Gerlach, Surf. Coat. Technol. 142, 808 (2001).
3. R. Wolf, K. Wandel, and B. Gruska, Surf. Coat. Technol. 142, 786 (2001).
4. B. Kim and S. Kim, Met. Mater. Int. 14, 637 (2008).
5. B. Kim, S. Kim, Y. H. Seo, D. H. Kim, S. J. Kim, and S. C. Jung, J. Nanosci. Nanotechnol. 8, (2008).
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A high-activity nitrogen plasma flow source for deposition of silicon nitride films;Surface and Coatings Technology;2016-05
2. Duty ratio impact on SiN films deposited in SiH4-NH3 plasma at room temperature;Microelectronic Engineering;2012-01
3. Room Temperature Deposition Process for Manufacturing Silicon Nitride Films Using Pulsed Plasma and Neural Network;Materials and Manufacturing Processes;2011-10
4. Impact of Duty Ratio-Controlled Ion Energy on Surface Roughness of Silicon Nitride Films Deposited Using a SiH4–NH3 Plasma;Journal of Nanoscience and Nanotechnology;2011-07-01
5. Duty ratio-controlled reflective property of silicon nitride films deposited at room temperature using a pulsed-PECVD at SiH4–NH3 plasma;Current Applied Physics;2011-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3