DfM at 28 nm and Beyond

Author:

Balasinski Artur

Publisher

Springer New York

Reference52 articles.

1. Liebmann, L., Pileggi, L., Hibbeler, J., Rovner, V., Jhaveri, T., Northrop, G.: Simplify to survive, prescriptive layouts ensure profitable scaling to 32 μm and beyond. In: Proceedings of SPIE, vol. 7275, p. 72750A (March 2009)

2. Liebmann, L., Baum, Z., Graur, I., Samuels, D.: DFM lessons learned from altPSM design. In: Proceedings of SPIE, 6925, 69250C (2008)

3. Perez, V., et al.: Convergent automated chip-level lithography checking and fixing at 45 nm. In: Proceedings of SPIE, 7275 (2009)

4. Hui, C., et al.: Hotspot detection and design recommendation using silicon-calibrated CMP model. In: Proceedings of SPIE, 7275 (2009)

5. Liebmann, L.: Layout impact of resolution enhancement techniques: impediment or opportunity? In: ISPD’03, Monterey (2003)

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