Chemical Vapor Deposition of Ceramic Materials-Reference-Cited by-同舟云学术

Chemical Vapor Deposition of Ceramic Materials

Published:1984 Issue: Volume: Page:299-316
ISSN:
Container-title:Emergent Process Methods for High-Technology Ceramics
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Author:

Blocher John M.,Browning Melvin F.,Barrett David M.

Publisher

Springer US

Link

http://link.springer.com/content/pdf/10.1007/978-1-4684-8205-8_23

Reference36 articles.

1. S. D. Allen, J. Appl. Phys., 52 [11], 6501 (1981).

2. R. S. Berg and D. M. Mattox, Proceedings of the Fourth International Conference on Chemical Vapor Deposition, 1973, The Electrochemical Society, Inc., Pennington, NJ.

3. J. Mazumder and S. D. Allen, Proceedings of the SPIE, 198, 73 (1979), San Diego, CA.

4. G. Leyendecker, D. Bauerle, P. Geittner, and H. Lydtin, Appl. Phys. Lett., 39 [11], 921 (1981).

5. C. P. Christensen and K. M. Lakin, Appl. Phys. Lett., 32 [4], 256 (1978).

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