1. F. Dill, A. Neureuther, J. Tuttle, and E. Walker, IEEE Trans. Electron Devices ED-22, 456 (1975).
2. C. Decken and D. Peters, Solid State Technol. Jan. 1980, p. 76.
3. M. Yamada, S. Mattori, and S. Monta, J. Electrochem. Soc. 129, 2598 (1982).
4. I. Adesida, J. Chinn, L. Rathbun, and E. Wolf, J. Vac. Sci. Technol. 21, 666 (1982).
5. M. Tsuda, S. Orkawa, W. Kanai, A. Yokota, I. Hijikata, A. Uehara, and H. Nakane, J. Cac. Sci. Technol. 19, 259 (1981).