A model for phosphorus segregation at the silicon-silicon dioxide interface-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

A model for phosphorus segregation at the silicon-silicon dioxide interface

Published:1989-12 Issue:6 Volume:49 Page:671-675
ISSN:0721-7250
Container-title:Applied Physics A Solids and Surfaces
language:en
Short-container-title:Appl. Phys. A

Author:

Lau F.,Mader L.,Mazure C.,Werner Ch.,Orlowski M.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF00616992.pdf

Reference14 articles.

1. A.S. Grove, O. Leistiko, C.T. Sah: J. Appl. Phys.35, 2695 (1964)

2. S. Solmi et al.: J. Electrochem. Soc.123, 655 (1976)

3. I.S. Johannessen et al.: J. Appl. Phys.49, 4453 (1978)

4. S.A. Schwarz et al.: J. Vac. Sci. Techn.15, 227 (1978)

5. S.A. Schwarz et al.: J. Electrochem. Soc., Solid-State Sci. Techn.128, 1101 (1981)

Cited by 83 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. TCAD modeling and simulation of self-limiting oxide growth and boron segregation during vertical silicon nanowire processing;Materials Science in Semiconductor Processing;2024-05

2. Influence of boron implantation induced defects on solar cells: Modeling the process defects;Journal of Applied Physics;2023-02-14

3. Performance of vertical gate-all-around nanowire p-MOS transistors determined by boron depletion during oxidation;Solid-State Electronics;2023-02

4. Process Simulation;Springer Handbook of Semiconductor Devices;2022-11-11

5. A Review of 3-Dimensional Wafer Level Stacked Backside Illuminated CMOS Image Sensor Process Technologies;IEEE Transactions on Electron Devices;2022-06

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3