Kinetics of CoSi2 from evaporated silicon

Author:

Lien C. -D.,Nicolet M. -A.,Lau S. S.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science

Reference15 articles.

1. M-A. Nicolet, S.S. Lau: InVLSI Electronics: Microstructure Science, Vol. 6, ed. by N.G. Einspruch,Materials and Process Characterization, ed. by N.G. Einspruch and G.B. Larrabee (Academic Press, New York 1983) Chap. 6

2. S.P. Murarka:Suicides for VLSI Applications (Academic Press, New York 1983)

3. S.S. Lau, J.W. Mayer, K.N. Tu: J. Appl. Phys.49, 4005 (1978)

4. G.J. van Gurp, C. Lagnereis: J. Appl. Phys.46, 4301 (1975)

5. H. Ishiwara: InProc. Symp. on Thin Film Interfaces and Interactions, ed. by J.E.E. Baglin, J.M. Poate (Electrochemical Society, Princeton, NJ 1980) Vol. 80-2, p. 159

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