In Situ Thickness Measurements of a Silicon Wafer with a Deposited Thin Layer Using Multi-Reflected Terahertz Electromagnetic Waves Through Quartz Chamber Window
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation,Radiation
Link
https://link.springer.com/content/pdf/10.1007/s10762-023-00919-0.pdf
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