Influence of scalloping on electrostatic forces in comb drive microdevices
Author:
Funder
Defence Research and Development Organisation
Publisher
Springer Science and Business Media LLC
Subject
General Medicine
Link
http://link.springer.com/content/pdf/10.1007/s41683-019-00042-0.pdf
Reference11 articles.
1. Avdeev IV, Lovell MR, Onipede D Jr (2003) Modeling in-plane misalignments in lateral combdrive transducers. J Micromech Microeng 13(6):809
2. Ayón Arturo A, Braff R, Chuang-Chia Lin, Sawin Herb H, Schmidt Martin A (1999) Characterization of a time multiplexed inductively coupled plasma etcher. J Electrochem Soc 146(1):339–349
3. Kambali PN, Pandey AK (2016) Capacitance and force computation due to direct and fringing effects in MEMS/NEMS arrays. IEEE Sens J 16(2):375–382
4. Li J, Zhang QX, Liu AQ, Goh WL, Ahn J (2003) Technique for preventing stiction and notching effect on silicon-on-insulator microstructure. J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom 21(6):2530–2539
5. Li J, Liu AQ, Zhang QX (2006) Tolerance analysis for comb-drive actuator using DRIE fabrication. Sens Actuators A Phys 125(2):494–503
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