Author:
Dodonov A. I.,Fayazov I. M.,Fedorovich S. D.,Krylova E. A.,Maskova E. S.,Molchanov V. A.,Eckstein W.
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science
Reference14 articles.
1. 47,1981
2. P. Sigmund: Nucl. Instrum. Methods Phys. Res B27 1 (1987)
3. N.G. Einspruch, D.M. Brown (eds.):VLSI Electronics. Microstructure Science. Vol. 8. Plasma Processing for VLSI (Academic, New York 1984)
4. O. Auciello: InErosion and Growth of Solids Stimulated by Atom and Ion Beams, ed. by G. Kiriakidis, G. Carter, J.L. Whitton (Nijhoff, Dordrecht 1986) p. 394
5. R. Becerra-Acevedo, J. Bohdansky, W. Eckstein, J. Roth: Nucl. Instrum. Methods Phys. Res. B2, 631 (1984)
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