Imaging ellipsometry measurement noises associated with non-uniform retardation of the compensator
Author:
Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Link
http://link.springer.com/content/pdf/10.1007/s10043-019-00569-5.pdf
Reference17 articles.
1. Tompkins, H.G., Irene, E.A.: Handbook of Ellipsometry, pp. 329–717. William Andrew, Inc. (2005)
2. Cahan, B.D., Spanier, R.F.: A high speed precision automatic ellipsometer. Surf. Sci. 16, 166–176 (1969)
3. Aspnes, D.E., Studna, A.A.: High precision scanning ellipsometer. Appl. Opt. 14(1), 220–228 (1975)
4. Lee, J., Rovira, P.I., An, I., Collins, R.W.: Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth. Rev. Sci. Instrum. 69, 1800 (1998)
5. Collins, R.W., Koh, J.: Dual-rotating-compensator multichannel ellipsometer: instrument design for real-time Mueller matrix spectroscopy of surfaces and films. J. Opt. Soc. Am. A 18(8), 1997–2006 (1999)
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