A Novel Technique for Measuring Defocus with Phase Shift Gratings on a Photomask
Author:
Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Link
http://link.springer.com/content/pdf/10.1007/s10043-001-0184-4.pdf
Reference7 articles.
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5. H. Nomura and T. Sato: Appl. Opt. 38 (1999) 2800.
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