Evolution of Microcracks in Epitaxial CeO2 Thin Films on YSZ-Buffered Si
Author:
Funder
National Research Foundation of Korea
Publisher
Springer Science and Business Media LLC
Subject
Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s13391-023-00449-w.pdf
Reference32 articles.
1. Jiang, J., Yoon, S.G.: Epitaxial 0.65 PbMg1/3Nb2/3O3–0.35 PbTiO3 (PMN–PT) thin films grown on LaNiO3/CeO2/YSZ buffered Si substrates. J. Alloy. Compd. 509(6), 3065–3069 (2011). https://doi.org/10.1016/j.jallcom.2010.11.200
2. Kim, E.J., Kweon, S.H., Nahm, S., Sato, Y., Tan, G., Kanno, I.: High output performance of piezoelectric energy harvesters using epitaxial Pb(Zr, Ti)O3 thin film grown on Si substrate. Appl. Phys. Lett. 121(16), 161901 (2022). https://doi.org/10.1063/5.0105103
3. Zhou, Z., Yoshida, S., Tanaka, S.: Epitaxial PMnN-PZT/Si MEMS ultrasonic rangefinder with 2 m range at 1 V drive. Sens. Actuators A Phys. 266, 352–360 (2017). https://doi.org/10.1016/j.sna.2017.09.058
4. Dekkers, M., Nguyen, M.D., Steenwelle, R., te Riele, P.M., Blank, D.H., Rijnders, G.: Ferroelectric properties of epitaxial Pb(Zr, Ti)O3 thin films on silicon by control of crystal orientation. Appl. Phys. Lett. 95(1), 012902 (2009). https://doi.org/10.1063/1.3163057
5. Wakiya, N., Yoshida, M., Kiguchi, T., Shinozaki, K., Mizutani, N.: RF-magnetron-sputtered heteroepitaxial YSZ and CeO2/YSZ/Si(001) thin films with improved capacitance–voltage characteristics. Thin Solid Films 411(2), 268–273 (2002). https://doi.org/10.1016/S0040-6090(02)00295-X
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