Modeling of Laser Chemical Vapor Deposition of Thin Films
Author:
Kar A.,Mazumder J.
Publisher
Springer Netherlands
Reference78 articles.
1. Abraham, E., and Halley, J. M., 1987, “Some Calculations of Temperature Profiles in Thin Films with Laser Heating”, Appl. Phys., Vol. A42, p. 279. 2. Allen, S. D., 1981, J. Appl. Phys., Vol. 52, p. 6501. 3. Allen, S. D., Goldstone, J. A., Stope, J. P., and Jan, R. Y., 1986, J. Appl. Phys. Vol. 59, p. 1653. 4. Allen, S. D., Jan, R. Y., Edwards, R. H., Mazuk, S. M., and Vernon, S. D., 1984, “Optical and Thermal Effects in Laser Chemical Vapor Deposition,” Proc., SPIE on Laser Assisted Deposition, Etching, and Doping, S. D. Allen, ed., SPIE-The Int. Soc. for Optical Engineering, Washington, Vol. 459, pp. 42- 48. 5. Allen, S. D., Trigubo, A. B., and Jan, R. Y., 1983, Mater. Res. Soc. Symp. Proc., Vol. 17, p. 207.
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