MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization-Reference-Cited by-同舟云学术

MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization

Published:1998 Issue: Volume: Page:109-120
ISSN:
Container-title:Tribology Issues and Opportunities in MEMS
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Author:

Sulouff R. E.

Publisher

Springer Netherlands

Link

http://link.springer.com/content/pdf/10.1007/978-94-011-5050-7_8

Reference11 articles.

1. Bhushan, B., Israelachvili, J., Landman, U., “Nanotechnology: Friction, Wear, and Lubrication at the Atomic Scale”, Nature, Vol. 374, April 1995, pp.607–616.

2. Chau, K.H.-L, Lewis, S., Zhao,Y., Howe, R., Bart, S., Marcheselli, R., “An Integrated Force-Balanced Capacitive Accelerometer for Low-G Applications,” Sensors and Actuators, vol. A. 54, 1996, pp. 472–476.

3. Core,T., Tsang, W., Sherman, S., “Fabrication Technology for an Integrated Surface-Micromachined Sensor”, Solid State Technology, Oct. 1993, pp.39–47.

4. Core, T., Howe, R., 1994, Method for Fabricating Microstructures, U.S. Patent 5,314,572.

5. Iler, R., 1979, The Chemistry of Silica, John Wiley & Sons, New York, p.3.

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