Micro/Nanotribological Studies of Single-Crystal Silicon and Polysilicon and SiC Films for Use in MEMS Devices
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Publisher
Springer Netherlands
Link
http://link.springer.com/content/pdf/10.1007/978-94-011-5050-7_29
Reference54 articles.
1. Beerschwinger, U., Albrecht, T., Mathieson, D., Rueben, R.L., Yang, S.J. and Taghizadeh, M. (1995), “Wear at Microscopic Scales and Light Loads for MEMS Applications”, Wear 181–183, 426–435.
2. Bhushan, B. (1992), Mechanics and Reliability of Flexible Magnetic Media, Springer-Verlag, New York.
3. Bhushan, B. (1995), Handbook of Micro/nanotribology, CRC, Boca Raton, FL.
4. Bhushan, B. (1996a), Tribology and Mechanics of Magnetic Storage Devices, 2 nd edition, Springer, New York.
5. Bhushan,B. (1996b), “Nanotribology and Nanomechanics of MEMS Devices”, Proc. Ninth Annual Workshop on Micro Electro Mechanical Systems, pp. 91–98, IEEE, New York.
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