1. I. Fujimasa: Micromachines: A New Era in Mechanical Engineering (Oxford Univ. Press, Oxford 1996)
2. W.S. Trimmer (Ed.): Micromachines and MEMS, Classic and Seminal Papers to 1990 (IEEE Press, New York 1997)
3. B. Bhushan: Tribology Issues and Opportunities in MEMS (Kluwer, Dordrecht 1998)
4. G.T.A. Kovacs: Micromachined Transducers Sourcebook (WCB McGraw-Hill, Boston 1998)
5. S.D. Senturia: Microsystem Design (Kluwer, Boston 2000)