Rapid Pulsed CO2 — Laser Annealing of Silicon-Nitride / Silicon Interface States
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Published:1993
Issue:
Volume:
Page:551-556
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ISSN:
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Container-title:Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
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language:
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Short-container-title:
Author:
Meixner J.,Hezel R.
Publisher
Springer Netherlands