Author:
Donnelly V. M.,Layadi N.,Lee J. T. C.,Herman I. P.,Guinn K. V.,Cheng C. C.
Reference39 articles.
1. D. L. Flamm and V. M. Donnelly, Plasma Chem. Plasma Proc. 1, 317 (1981).
2. D. L. Flamm, V. M. Donnelly, and D. E. Ibbotson, in VLSI Electronics Microstructure Science, edited by N. G. Einspruck and D. M. Brown (Academic Press, NY, 1984), pp. 189–251.
3. D. M. Manos and D. L. Flamm, Plasma Etching, An Introduction (Academic Press, Boston 1989).
4. C. C. Cheng, K. V. Guinn, V. M. Donnelly, and I. P. Herman, J. Vac. Sci. Technol. A 12, 2630 (1994).
5. P. I. Herman, V. M. Donnelly, K. V. Guinn, and C. C. Cheng, Phys. Rev. Lett. 72, 2801 (1994).