Author:
Karna S.P.,Kurtz H. A.,Pineda A. C.,Shedd W. M.,Pugh R. D.
Reference96 articles.
1. D. Kahng, U.S. Patent 3102230 (1960).
2. Semiconductor Industry Roadmap, 1998.
3. D. A. Muller, T. Sorsch, S. Moccio, F. H. Bauman, K. Evans-Lutterodt, and G. Timp (1999), Nature
399, 78.
4. J. H. Stathis and D. J. Dimaria, IEDM Tech. Dig. 1998, 167; J. Stathis and D. J. Dimaria (1999), Microelectron. Engg.
48, 395.
5. Y. Nishi (1966), Japan. J. AppL Phys.
5, 333.
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