Publisher
Springer International Publishing
Reference48 articles.
1. Slocum AH (1992) Precision machine design. Prentice-Hall, Englewood Cliffs
2. Lee CB, Lee S-K (2013) Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder—review. J Mech Sci Technol 27(1):141–152
3. Gao W (2010) Precision nanometrology: sensors and measuring systems for nanomanufacturing. Springer, London
4. Webster JG (1999) The measurement, instrumentation, and sensors handbook. CRC Press LLC, Boca Raton
5. Riemer O (2011) Advances in ultraprecision manufacturing. Proc Jpn Soc Precis Eng
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献