Porous SiC
Author:
Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-08726-9_3
Reference28 articles.
1. Brack K (1965) X-ray method for the determination of the polarity of SiC crystals. J Appl Phys 36:3560–3562
2. Shor JS, Osgood RM, Kurtz AD (1992) Photoelectrochemical conductivity selective etch stops for SiC. Appl Phys Lett 60:1001–1003
3. Shor JS, Grimberg I, Weiss B-Z, Kurtz AD (1993) Direct observation of porous SiC formed by anodization in HF. Appl Phys Lett 62:2836–2838
4. Shor JS, Osgood RM (1993) Broad-area photoelectrochemical etching of n-type beta-SiC. J Electrochem Soc 140:L123–L125
5. Shor JS, Kurtz AD (1994) Photoelectrochemical etching of 6H-SiC. J Electrochem Soc 141:778–781
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