Nano-metal-Assisted Chemical Etching for Fabricating Semiconductor and Optoelectronic Devices
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Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-45098-8_21
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1. Microelectromechanical Systems (MEMS) for Biomedical Applications;Micromachines;2022-01-22
2. Effect of Various Copper Salt Precursors on Metal-Assisted Chemical Etching of Silicon;ECS Journal of Solid State Science and Technology;2019
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