Control of a Magnet-Driven Nano Positioning Stage with Long Stroke Based on Disturbance Observer

Author:

Ma Letong,Mo Xixian,Zhang Bo,Ding Han

Publisher

Springer International Publishing

Reference17 articles.

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2. Li, C.-X., Guo-Ying, G., Yang, M.-J., Zhu, L.-M.: Design, analysis and testing of a parallel-kinematic high-bandwidth XY nanopositioning stage. Rev. Sci. Instrum. 84, 12522 (2013)

3. Li, C.-X., Gu, G.-Y., Yang, M.-J., Zhu, L.-M.: High-Speed tracking of a nanopositioning stage using modified repetitive control. IEEE Trans. Autom. Sci. Eng.

4. Liu, C.-H., Jywe, W.-Y., Jeng, Y.-R., Hsu, T.-H., Li, Y.-T.: Design and control of a long-traveling nanopositioning stage. Precision Eng. 34, 497–506 (2010)

5. Jie, D., Sun, L., Liu, Y., Zhu, Y., Cai, H.: Design and simulation of a macro-micro dual-drive high acceleration precision XY-stage for IC bonding technology. In: 2005 6th International Conference on Electronic Packaging Technology

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