Recent Advances in Multilayer Reflective Optics for EUV/X-Ray Sources
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Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-19521-6_43
Reference13 articles.
1. Takenaka, H., Ichimaru, S., Ohchi, T., Gullikson, E.M.: J. Electron Spectrosc. Relat. Phenom. Soft-X-ray reflectivity and heat resistance of SiC/Mg multilayer. 144–147, 1047–1049 (2005)
2. Soufli, R., Fernández-Perea, M., Robinson, J.C., Baker, S.L., Alameda, J., Gullikson, E.M.: Corrosion-resistant, high-reflectance Mg/SiC multilayer coatings for solar physics in the 25–80 nm wavelength region. Proc. SPIE. 8443, 84433R (2012)
3. Soufli, R., Fernández-Perea, M., Baker, S.L., Robinson, J.C., Alameda, J., Walton, C.C.: Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings. App. Phys. Lett. 101, 04311 (2012)
4. Fernández-Perea, M., Soufli, R., Robinson, J.C., Rodríguez-de Marcos, L., Mendez, J.A., Larruquert, J.I., Gullikson, E.M.: Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25–80 nm wavelength region. Opt. Express. 20, 24018–24029 (2012)
5. Soufli, R., et al.: Corrosion-resistant Mg/SiC multilayer coatings for EUV laser sources in the 25–80 nm wavelength region. Proc. SPIE. 8849, 88490D (2013)
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