1. E.W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, and D. Munchmeyer: Microelectr. Eng., 1986, vol. 4, pp. 35–56.
2. W. Bacher, W. Menz, and J. Mohr: IEEE Trans. Ind. Electr., 1995, vol. 42 (5), pp. 431–41.
3. J. Mohr: Sensors Materials, 1998, vol. 10 (6), pp. 363–73.
4. M. Polosky, T.R. Christenson, A.A. Jojola, and D.W. Plummer: Book of Abstracts, 3rd Int. Workshop on High Aspect Ratio Microstructure Technology (HARMST ’99). Kisarazu, Japan, 1999, pp. 144–45.
5. T.R. Christenson, T.E. Buchheit, and D.T. Schmale: Materials Science of Microelectromechanical Systems (MEMS) Devices, Materials Research Society Symposia Proceedings, Materials Research Society, Pittsburgh, PA, 1999, vol. 546, pp. 127–31.