Damage Formation and Evolution in Ion-Implanted Crystalline Si-Reference-Cited by-同舟云学术

Damage Formation and Evolution in Ion-Implanted Crystalline Si

Published:2009 Issue: Volume: Page:147-212
ISSN:0303-4216
Container-title:Topics in Applied Physics
language:
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Author:

Libertino Sebania,La Magna Antonino

Publisher

Springer Berlin Heidelberg

Link

http://link.springer.com/content/pdf/10.1007/978-3-540-88789-8_6.pdf

Reference139 articles.

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2. P.M. Fahey, P.B. Griffin, J.D. Plummer, Rev. Mod. Phys. 61(2), 289 (1989)

3. H.G. Van Bueren, Imperfections in Crystals (North-Holland, Amsterdam, 1961)

4. R. Car, P.J. Kelly, A. Oshiyama, S.T. Pantelides, in Thirteenth International Conference on Defects in Semiconductors, ed. by L.C. Kimerling, J.M. Parsey Jr. (AIME, Warrendale, 1985), p. 269

5. G.D. Watkins, in Radiation Damage in Semiconductors (Dunod, Paris, 1964), p. 97

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