A Novel Micro-cantilever Based Angular Speed Sensor Controlled Piezoelectrically and Tuned by Electrostatic Actuators
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://link.springer.com/content/pdf/10.1007/s11220-015-0110-7.pdf
Reference30 articles.
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3. Rezazadeh, G., Lotfiani, A., & Khalilarya, S. (2009). On the modeling of a MEMS-based capacitive wall shear stress sensor. Measurement, 42, 202–207.
4. Rezazadeh, G., Ghanbari, M., Mirzaee, I., & Keyvani, A. (2010). On the modeling of a piezoelectrically actuated micro sensor for simultaneous measurement of fluids viscosity and density. Measurement, 43, 1516–1524.
5. Renaudin, L., Bonnardot, F., Musy, O., Doray, J. B., & Rémond, D. (2010). Natural roller bearing fault detection by angular measurement of true instantaneous angular speed. Mechanical Systems and Signal Processing, 24, 1998–2011.
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