Wide range pressure sensor based on a piezoelectric bimorph microcantilever
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2190462
Reference8 articles.
1. Micromechanics senses biomolecules
2. Detection of Pb2+ Using a Hydrogel Swelling Microcantilever Sensor
3. A Sensitive Method to Measure Changes in the Surface Stress of Solids
4. Selectivity of chemical sensors based on micro-cantilevers coated with thin polymer films
5. Chemical sensors and biosensors in liquid environment based on microcantilevers with amplified quality factor
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