Novel MEMS Piezoresistive Sensor with Hair-Pin Structure to Enhance Tensile and Compressive Sensitivity and Correct Non-Linearity
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering
Link
https://link.springer.com/content/pdf/10.1007/s10836-020-05895-0.pdf
Reference19 articles.
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4. Bao M, Yu L, Wang Y (1991) Stress concentration structure with front beam for pressure sensor. Sensors Actuators A Phys 28(2):105–112
5. Beeby SP, Stuttle M, White NM (2000) Design and fabrication of low cost microengineered silicon pressure sensor with linearized output. Proc IEEE Sci Meas Technol 147(3):127–130
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