Spin coating process of sol-gel silicate films deposition: Effect of spin speed and processing temperature

Author:

Vorotilov Konstantin,Petrovsky Vladimir,Vasiljev Vladimir

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Condensed Matter Physics,Biomaterials,General Chemistry,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. C.J. Brinker and G.W. Scherer, Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing (Academic Press, San Diego, CA, 1990).

2. Sol-Gel Technology for Thin Films, Fibers, Preforms, Electronics, and Speciality Shapes, edited by L.C. Klein (Noyes, Park Ridge, N.J., 1988).

3. L.D. Molnar, Semiconductor International 12, 92 (1989).

4. J.F. Scott, C.A. Paz De Araujo, and L.D. McMillan, Condensed Matter News 1, 16 (1992).

5. A.S. Sigov, K.A. Vorotilov, A.S. Valeev, and M.I. Yanovskaya, Journal of Sol-Gel Science and Technology 2, 563 (1994).

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