1. SIA International Technology Roadmap for Semiconductors; Inter-national Sematech: Austin, Texas, 2004.
2. Dammel, R. Diazonaphthoquinone-Based Resists; SPIE Press: Bellingham, Washington, USA, 1993.
3. Macdonald, S. A.; Willson, C. G.; Frechet, J. M. J. Accounts of Chemical Research 1994, 27, 151.
4. Reichmanis, E.; Thompson, L. F. Chem. Rev. 1989, 89, 1273.
5. Willson, C. G. In Introduction to Microlithography, 2nd ed, Thomp-son, L. F., Willson, C. G., Bowden, M. J., Eds.; American Chemical Society: Washington, DC, 1994, pp. 139-258.