Microengine Fabrication
Author:
Publisher
Springer US
Link
http://link.springer.com/content/pdf/10.1007/978-0-387-77747-4_4
Reference34 articles.
1. Ayon, A.A.; Braff, R.A.; Bayt, R.; Sawin, H.H.; Schmidt, M.A., Influence of coil power on the etching characteristics in a high density plasma etcher, Journal of the Electrochemical Society, v 146, n 7, July, 1999, pp 2730–2736
2. Ayon, A.A.; Braff, R.; Lin, C.C.; Sawin, H.H.; Schmidt, M.A., Characterization of a time multiplexed inductively coupled plasma etcher, Journal of the Electrochemical Society, v 146, n 1, January, 1999, pp 339–349
3. Ayon, A.A.; Nagle, S.; Frechette, L.; Epstein, A.; Schmidt, M.A., Tailoring etch directionality in a deep reactive ion etching tool, Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v 18, n 3, May, 2000, pp 1412–1416
4. Ayon, A.A.; Bayt, R.L.; Breuer, K.S., Deep reactive ion etching: A promising technology for micro-and nanosatellites, Smart Materials and Structures, v 10, n 6, December, 2001, pp 1135–1144
5. Ayon, A.A.; Zhang, X.; Khanna, R. Anisotropic silicon trenches 300–500 μm deep employing time multiplexed deep etching (TMDE), Sensors and Actuators, A: Physical, v 90, n 3, July 15, 2001, pp 381–385
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