Mechanical and elastic properties of amorphous hydrogenated silicon films studied by broadband surface acoustic wave spectroscopy
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Link
http://link.springer.com/content/pdf/10.1007/BF01538192.pdf
Reference26 articles.
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4. A. Neubrand, P. Hess: J. Appl. Phys.71, 227 (1991)
5. A.A. Kolomenskii, M. Szabadi, P. Hess: Appl. Surf. Sci.86, 591 (1995)
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