Author:
Shoji Shuichi,Ishizuka Masanori,Sato Hironobu,Arakawa Takahiro,Mizuno Jun
Reference17 articles.
1. Shoji S (2000) Micromachining for biosensors and biosensing systems. In: Yong VC, Ngo TT (eds) Biosensors and their applications. Kluwer Academic/Plenum Pub, New York, pp 225–241
2. Heschel M, Boustra S (1997) Conformal coating by photoresist of sharp corners of anisotropically etched through-holes in silicon. Tech Dig Transducers’97, vol 1, pp 209–212
3. Motokawa S, Momamedi M, Momma T, Shoji S, Osaka T (2004) MEMS-based design and fabrication of a new concept micro direct methanol fuel cell. Electrochem Commun 6:562–565
4. Houjou H, Motokawa S, Ishizuka M, Mizuno J, Momma T, Osaka T, Shoji S (2005) Metallization on 3-D microstructures using spray coating for high performance micro direct methanol fuel cell (µDMFC). In: Proceeding of Transducers’05, Seoul, pp 1437–1440
5. Singh VK, Sasaki M, Song JH, Hane K (2003) Heating effect on photoresist in spray coating technique for three-dimensional lithography. Jpn J Appl Phys 42:4027–4030
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献