Heating Effect on Photoresist in Spray Coating Technique for Three-Dimensional Lithography-Reference-Cited by-同舟云学术

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Heating Effect on Photoresist in Spray Coating Technique for Three-Dimensional Lithography

Published:2003-06-30 Issue:Part 1, No. 6B Volume:42 Page:4027-4030
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Singh Vijay Kumar,Sasaki Minoru,Song Jong Hyeong,Hane Kazuhiro

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/42/i=6S/a=4027/pdf

Cited by 20 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Piezoelectric Vibration Energy Harvester Using Polyvinylidene Difluoride Film Formed by Bar-Coating Method and Its Spray- Coating Method on a Three Dimensional Surface;Piezoelectricity - Organic and Inorganic Materials and Applications;2018-08-29

2. Film formation and characterisation of PVDF piezoelectric polymer thin film by spray coating and its application to helical spring;International Journal of Nanotechnology;2018

3. Spray Coating Deposition of Thin Resist Film on Fiber Substrates;Japanese Journal of Applied Physics;2012-11-01

4. Spray Coating Deposition of Thin Resist Film on Fiber Substrates;Japanese Journal of Applied Physics;2012-10-22

5. Photoresist Spray Coating Using a Shield Plate with an Aperture for Uniform Deposition onto Trench-Type Three-Dimensional Microdevice Structures;Japanese Journal of Applied Physics;2012-02-20

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