Author:
Giridhar M. S.,Jambhalikar Ashwini,John J.,Islam R.,Nagendra C. L.,Alex T. K.
Publisher
Springer Science and Business Media LLC
Reference4 articles.
1. Kim Jong-Man, Jae-Hyoung Park, Chang-Wook Baek, Yong-Kweon Kim 2004 The SiOG-based single crystalline silicon (SCS) RFMEMS switch with uniform characteristics. J. Microelectromechanical Systems 13: 1036–1042
2. Kim Jong-Man, Sanghyo Lee, Jung-Mu Kim, Chang-Wook Baek, Youngwoo Kwon, Yong-Kweon Kim 2005 A Mechanically reliable digital-type single crystalline silicon (SCS) RF MEMS variable capacitor. J. Micromechanics and Microengineering 15: 1854–1836
3. Rebeiz M Gabriel 2003 RF MEMS Theory, design and technology, (Hoboken: John Wiely and Sons)
4. Sakatak M, Komura Y, Seki T, Kobayashi K, Sano K, Horike S 1999 Micromachined relay which uses single crystal silicon electrostatic actuator, 12th IEEE International Conf. on Microelectromechanical Systems 21–24
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