Optimization and analysis of bridge type RF MEMS switch for X-band

Author:

Sravani K. GirijaORCID

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Angaria M, Rangra K (2016) A novel design for low insertion loss multiband RF-MEMS switch with low pull-in voltage. Eng Sci Technol Int J ELSEVIER 19:171–177

2. Evgeny AS, Chadin KA, Kirtaev RV (2017) Design and manufacturing of X-band RF MEMS switches. Microsyst Technol. https://doi.org/10.1007/s00542-017-3629-9

3. Giridhar A, jambhalikar, J John, (2009) An X band RF MEMS SWITCH based on silicon on glass architecture. Lab Electro-Opt Syst Thin Films Microsyst Group Indian Space Res Org 34:625–631

4. Katehi LPB, Harvey JF, Brown E (2002) MEMS and Si micro machined circuits for high frequency applications. IEEE Trans Microwav Theory Tech 50(3):858–866

5. Kim J-M, Park J-H (2004) The SIOG-based single-crystalline silicon (SCS) RF MEMS switch with uniform characteristics. J Micro Electro Mech Syst 13(6):1036–1042

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