Problems and Solutions of Automation of Magnetron Sputtering Process in Vacuum-Reference-Cited by-同舟云学术

Problems and Solutions of Automation of Magnetron Sputtering Process in Vacuum

Published:2020 Issue: Volume: Page:944-952
ISSN:1876-1100
Container-title:Lecture Notes in Electrical Engineering
language:
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Author:

Sidorova S. V.,Kouptsov A. D.,Pronin M. A.

Publisher

Springer International Publishing

Link

http://link.springer.com/content/pdf/10.1007/978-3-030-39225-3_101

Reference20 articles.

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2. Kouptsov, A.D.: Metal thin-film coatings for solar panels. In: XXV Scientific and Technical Conference with the Participation of Foreign Experts Vacuum Science and Technology, Sudak, 16–22 September 2018, pp. 187–192 (2018)

3. Nikitin, M.M.: Vacuum deposition technology and equipment. Metallurgy 8, 110 (1992)

4. Laser MEASURER LAES (2018). http://www.spectrosystems.ru/analytical/laes/laes_measurer.shtml . Accessed 16 Dec 2018

5. Efremov, A.M., Svettsov, V.I., Rybkin, V.V.: Vacuum Plasma Processes, and Technology. ISCTU, Ivanovo (2006)

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