Analysis of Insulation Characteristics of C2F6-N2 Mixtures
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Publisher
Springer International Publishing
Link
https://link.springer.com/content/pdf/10.1007/978-3-031-22200-9_21
Reference16 articles.
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3. Chae, H., Sawin, H.H.: Plasma kinetic study of silicon-dioxide removal with fluorocompounds in a plasma-enhanced chemical vapor deposition chamber. J. Korean Phys. Soc. 51, 978–983 (2007)
4. Christophorou, L.G., Hunter, S.R., Carter, J.G., Mathis, R.A.: Gases for possible use in diffuse-discharge switches. Appl. Phys. Lett. 41, 147–149 (1982)
5. Pirgov, P., Stefanov, B.: Elastic and inelastic e-C2F6 and e-C3F8 cross sections from swarm data. J. Phys. B: At., Mol. Opt. Phys. 23, 2879 (1990)
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