Design and Optimization of a Shunt RF MEMS Switch with a Hybrid Contact Type-Reference-Cited by-同舟云学术

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Design and Optimization of a Shunt RF MEMS Switch with a Hybrid Contact Type

Published:2022 Issue: Volume: Page:281-299
ISSN:0930-8989
Container-title:Springer Proceedings in Physics
language:
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Author:

Tkachenko Alexey^ORCID,Lysenko Igor^ORCID,Denisenko Mark^ORCID,Ezhova Olga^ORCID

Publisher

Springer International Publishing

Link

https://link.springer.com/content/pdf/10.1007/978-3-030-81119-8_30

Reference23 articles.

1. J. Bouchaud, B. Knoblich, RF MEMS switches deliver on early promise. Sens. Trans. J. 86, 1802–1808 (2007)

2. A. Berezniak, A. Korotkov, Solid-state microwave switches: circuitry, manufacturing technologies and development trends. Review (Part 1). Radioelectronics Commun. Syst. 56(4), 159–177 (2013)

3. A. Berezniak, A. Korotkov, Solid-state microwave switches: circuitry, manufacturing technologies and development trends. Review (Part 2). Radioelectron. Commun. Syst. 56(5), 213–226 (2013)

4. K. Guha et al., A new analytical model for switching time of a perforated MEMS switch. Microsyst. Technolog. 26(3), 3143–3152 (2018)

5. R. Kumar, Design and simulation of MEMS shunt capacitive switch for lower switching time. 3C Tecnología. Glosas de innovación aplicadas a la pyme. Spec. Issue Recent Trends Comput. Sci. Electron. 167–178 (2019)

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