Piezoelectric MEMS for Sensors, Actuators and Energy Harvesting
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Publisher
Springer International Publishing
Link
https://link.springer.com/content/pdf/10.1007/978-3-031-08136-1_41
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2. https://eu.mouser.com/applications/mems-technology/
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5. Nastro, A., Ferrari, M., Russo, A.-L., Ardito, R., Ferrari, V.: MEMS force sensor with DDS-based position feedback and tunable sensitivity. In: 2017 IEEE SENSORS Proceedings, pp. 1–3. IEEE, Glasgow, UK (2017)
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