Piezoelectric MEMS Flexural-Plate-Wave Transducer for Alignment of Microparticles in a Drying Droplet
Author:
Affiliation:
1. Department of Information Engineering, University of Brescia, Brescia, Italy
2. ADT MEMS, Grenoble, France
3. CNRS, Grenoble INP, TIMA, University Grenoble Alpes, Grenoble, France
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Link
http://xplorestaging.ieee.org/ielx7/7361/10472410/10415358.pdf?arnumber=10415358
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1. Simulation and Experimental Validation of a Flexural Plate Wave Piezoelectric MEMS Transducer;2024 IEEE Sensors Applications Symposium (SAS);2024-07-23
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