Design and Control of a Normal-Stressed Electromagnetic Actuated Nano-positioning Stage
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Publisher
Springer International Publishing
Link
https://link.springer.com/content/pdf/10.1007/978-3-030-89098-8_31
Reference21 articles.
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4. Yong, Y.K., et al.: Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues. Rev. Sci. Instrum. 83(12), 121101 (2012)
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1. Electromagnetic-Mechanical Modeling and Evaluation of a 2-DoF Parallel-Kinematic Compliant Nano-Positioning Stage Based on Normal-Stressed Electromagnetic Actuators;IEEE Transactions on Automation Science and Engineering;2024
2. Serial-Kinematic Hybrid Electromagnetic-Piezoelectric AFM Scanner for High-Throughput Raster Scanning;IEEE Transactions on Industrial Electronics;2024
3. Open-loop fast tool servo-based high-speed turning of micro-structured surfaces;SCIENTIA SINICA Technologica;2022-04-15
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