Preparation, Phase Composition, Nanostructure, Dielectric and Ferroelectric Characteristics of Sr0.6Ba0.4Nb2O6 Thin Films Grown on a Silicon Substrate in an Oxygen Atmosphere

Author:

Pavlenko A. V.ORCID,Matyash Ya. Yu.ORCID,Stryukov D. V.ORCID,Makinyan N. V.ORCID

Publisher

Springer Nature Switzerland

Reference14 articles.

1. Gritsenko, V.A., Islamov, D.R.: Physics of dielectric films: mechanisms of charge transport and physical basis of memory devices. Parallel, Novosibirsk, Russia (2017). (In Russian)

2. Mikolajick, T., et al.: Next generation ferroelectric materials for semiconductor process integration and their applications. J. Appl. Phys. 129, 100901 (2021)

3. Zhang, J.J., Sun, J., Zheng, X.J.: A model for the C-V characteristics of the metal–ferroelectric–insulator–semiconductor structure. Solid-State Electron. 53, 170–175 (2009)

4. Shvartsman, V.V., Lupascu, D.C.: Lead-free relaxor ferroelectrics. J. Am. Ceram. Soc. 95, 1–26 (2012)

5. Pavlenko, A.V., Zinchenko, S.P., Stryukov, D.V., Kovtun, A.P.: Nano-sized Films of Barium-Strontium Niobate: Features of Obtaining in a High-frequency Discharge Plasma. Structure and Physical Properties. SSC RAS Press, Rostov-on-Don, Russia (2022). (In Russian)

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