Laser etching and dry processing
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanics of Materials,General Materials Science
Link
http://link.springer.com/content/pdf/10.1007/BF02744552.pdf
Reference22 articles.
1. Baklanov M R, Beterov I M, Repinski S M, Rzhanov A V, Chebotaev V D and Yarshina V I 1974Sov. Phys. Dokl. 19 312
2. Bjorkholm J E and Ballman A A 1983Appl. Phys. Lett. 43 594
3. Chuang T J 1980J. Chem. Phys. 72 6303
4. Ehrlich D J, Osgood Jr R M and Deutsch T F 1980aIEEE J. Quantum Electron. 16 1233
5. Ehrlich D J, Osgood Jr R M and Deutsch T F 1980bAppl. Phys. Lett. 36 698
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