Laser processing of III–V compound semiconductors

Author:

Vengurlekar A S

Publisher

Springer Science and Business Media LLC

Subject

Mechanics of Materials,General Materials Science

Reference16 articles.

1. Abe M, Mimura T, Nishiuchi K and Yokoyama N 1985 inVLSI electronics—microstructure science (ed.) N G Einspruch and W R Wisseman (London: Academic Press) vol. 11

2. Anderson C L, Dunlap H L, Hess L D, McFarlane R A and Vaidyanathan K V 1980 inProc. laser and electron beam processing of electronic materials (eds) C L Anderson, G K Celler and G A Rozgonyi (Princeton: Electrochemical Society) p. 334

3. Braslaw N, Gunn J R and Staples J L 1967Solid-State Electron. 10 381

4. Eckhardt G 1980 inLaser and electron beam processing of materials (ed.) C W White and P S Peerey (Orlando: Academic Press)

5. Fan J C C, Donnelly J P, Bozler C O and Chapman R L 1979 inProceedings of 7th International Symposium on GaAs and related compounds (London: Institute of Physics) p. 472

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