Optical nanolithography with λ/15 resolution using bowtie aperture array-Reference-Cited by-同舟云学术

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Optical nanolithography with λ/15 resolution using bowtie aperture array

Published:2014-01-30 Issue:1 Volume:117 Page:307-311
ISSN:0947-8396
Container-title:Applied Physics A
language:en
Short-container-title:Appl. Phys. A

Author:

Wen Xiaolei,Traverso Luis M.,Srisungsitthisunti Pornsak,Xu Xianfan,Moon Euclid E.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s00339-014-8265-y.pdf

Reference17 articles.

1. Z. Xie, W. Yu, T. Wang, H. Zhang, Y. Fu, H. Liu, F. Li, Z. Lu, Q. Sun, Plasmonics 6, 565 (2011)

2. S.Y. Chou, P.R. Krauss, P.J. Renstrom, Appl. Phys. Lett. 67, 3114 (1995)

3. D.L. Wilson, R. Martin, M. Cronin-Golomb, C.A. Mirkin, D.L. Kaplan, Microsc. Microanal. 8, 1020 (2002)

4. J.I. Mitchell, S.J. Park, C.A. Watson, P. Srisungsitthisunti, C. Tansarawiput, M. Qi, E.A. Stach, C. Yang, X. Xu, Opt. Eng. 50, 5 (2011)

5. L. Pan, Y. Park, Y. Xiong, E. Ulin-Avila, Y. Wang, L. Zeng, S. Xiong, J. Rho, C. Sun, D.B. Bogy, X. Zhang, Sci. Rep. 1, 175 (2011)

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